The Resource Diazonaphthoquinone-based resists, Ralph Dammel

Diazonaphthoquinone-based resists, Ralph Dammel

Label
Diazonaphthoquinone-based resists
Title
Diazonaphthoquinone-based resists
Statement of responsibility
Ralph Dammel
Creator
Contributor
Author
Publisher
Subject
Language
eng
Summary
This book elucidates the reasons underlying the lasting success of DNQ/N resist systems by examining the correlation between the chemical structure of the components and the photoresist performance. The basic chemistry of both DNQ sensitizers and novolak resins are explored. Focus also is placed on the chemical basis of application-related facets of the lithographic process. Methods of increasing process performance, such as image reversal, top layer imaging, antireflection layers, and phase shift technology are treated
Member of
Cataloging source
SPIES
Dewey number
621.3815/31
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.D34 1993eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Tutorial texts in optical engineering
Series volume
v. TT 11
Target audience
adult
Label
Diazonaphthoquinone-based resists, Ralph Dammel
Publication
Copyright
Note
"SPIE Digital Library."--Website
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
black and white
Content category
  • still image
  • text
Content type MARC source
  • rdacontent
  • rdacontent
Contents
Preface -- Chapter 1. Introduction -- Chapter 2. Basic chemistry of DNQ/Novolak resists -- Chapter 3. Basic chemistry of Novolaks -- Chapter 4. DNQ/Novolak interactions -- Chapter 5. Step-by-step view of the lithographic process -- Chapter 6. Advanced processing schemes for DNQ resists -- Chapter 7. Outlook on DNQ/Novolak systems -- Index
Control code
ocn985314648
Dimensions
unknown
Extent
1 online resource (203 pages)
Form of item
online
Isbn
9781510607989
Media category
electronic
Media MARC source
isbdmedia
Other control number
10.1117/3.2265072
Other physical details
illustrations
http://library.link/vocab/recordID
.b36997298
Specific material designation
remote
System control number
  • (OCoLC)985314648
  • spie1510607986

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
Processing Feedback ...