The Resource Fabrication and design of resonant microdevices, Behraad Bahreyni

Fabrication and design of resonant microdevices, Behraad Bahreyni

Label
Fabrication and design of resonant microdevices
Title
Fabrication and design of resonant microdevices
Statement of responsibility
Behraad Bahreyni
Creator
Subject
Language
eng
Summary
This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Member of
Cataloging source
OPELS
Dewey number
621
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.B35 2008
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Micro & nano technologies
Series volume
3
Label
Fabrication and design of resonant microdevices, Behraad Bahreyni
Publication
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications
Control code
ocn459953616
Dimensions
unknown
Extent
1 online resource (xiii, 181 pages)
Form of item
online
Isbn
9780080947570
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations
http://library.link/vocab/ext/overdrive/overdriveId
154021:154181
http://library.link/vocab/recordID
.b29947224
Specific material designation
remote
System control number
  • (OCoLC)459953616
  • knovel0080947573

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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