The Resource Handbook of microlithography, micromachining, and microfabrication, Volume 1, Microlithography, P. Rai-Choudhury, editor

Handbook of microlithography, micromachining, and microfabrication, Volume 1, Microlithography, P. Rai-Choudhury, editor

Label
Handbook of microlithography, micromachining, and microfabrication, Volume 1, Microlithography
Title
Handbook of microlithography, micromachining, and microfabrication
Title number
Volume 1
Title part
Microlithography
Statement of responsibility
P. Rai-Choudhury, editor
Title variation
  • Microlithography, micromachining, and microfabrication
  • Microlithography
Contributor
Editor
Publisher
Subject
Language
eng
Summary
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook
Member of
Cataloging source
SPIES
Dewey number
670
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.H3423 1997 v.1eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
SPIE Press monograph
Series volume
PM39
Target audience
adult
Label
Handbook of microlithography, micromachining, and microfabrication, Volume 1, Microlithography, P. Rai-Choudhury, editor
Publication
Copyright
Note
"SPIE Digital Library."--Website
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
black and white
Content category
  • still image
  • text
Content type MARC source
  • rdacontent
  • rdacontent
Contents
Preface -- Introduction / Burn J. Lin, P. Rai-Choudhury -- 1. Optical lithography / Harry J. Levinson, William J. Arnold -- 2. Electron beam lithography / Mark A. McCord, Michael J. Rooks -- 3. X-ray lithography / Franco Cerrina -- 4. Deep-UV resist technology / Robert D. Allen, Willard E. Conley, Roderick R. Kunz -- 5. Photomask fabrication procedures and limitations / John G. Skinner, Timothy R. Groves, Anthony Novembre, Hans Pfeiffer, Rajeev Singh -- 6. Metrology methods in photolithography / Laurie J. Lauchlan, Diana Nyyssonen, Neal Sullivan -- 7. Optical lithography modeling / Andrew R. Neureuther, Chris A. Mack -- 8. Issues in nanolithography for quantum effect device manufacture / Martin C. Peckerar, F. Keith Perkins, Elizabeth A. Dobisz, Orest J. Glembocki -- Index
Control code
ocn985337265
Dimensions
unknown
Extent
1 online resource (viii, 768 pages)
Form of item
online
Isbn
9781510607965
Media category
electronic
Media MARC source
isbdmedia
Other control number
10.1117/3.2265070
Other physical details
illustrations
http://library.link/vocab/recordID
.b36995678
Specific material designation
remote
System control number
  • (OCoLC)985337265
  • spie151060796X

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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