The Resource Handbook of microlithography, micromachining, and microfabrication, Volume 2, Micromachining and microfabrication, P. Rai-Choudhury, editor

Handbook of microlithography, micromachining, and microfabrication, Volume 2, Micromachining and microfabrication, P. Rai-Choudhury, editor

Label
Handbook of microlithography, micromachining, and microfabrication, Volume 2, Micromachining and microfabrication
Title
Handbook of microlithography, micromachining, and microfabrication
Title number
Volume 2
Title part
Micromachining and microfabrication
Statement of responsibility
P. Rai-Choudhury, editor
Title variation
  • Microlithography, micromachining, and microfabrication
  • Micromachining and microfabrication
Contributor
Editor
Publisher
Subject
Language
eng
Summary
This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications
Member of
Cataloging source
SPIES
Dewey number
670
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.H3423 1997 v.2eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
SPIE Press monograph
Series volume
PM40
Target audience
adult
Label
Handbook of microlithography, micromachining, and microfabrication, Volume 2, Micromachining and microfabrication, P. Rai-Choudhury, editor
Publication
Copyright
Note
"SPIE Digital Library."--Website
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
black and white
Content category
  • still image
  • text
Content type MARC source
  • rdacontent
  • rdacontent
Contents
Preface -- 1. Micromachining and trends for the twenty-first century / Paul J. McWhorter, A. Bruno Frazier, P. Rai-Choudhury -- 2. Wet chemical etching of silicon and SiO2 and ten challenges for micromachiners / Don L. Kendall and Robert A. Shoultz -- 3. Applications of dry etching to microsensors, field emitters and optical devices / Stella W. Pang -- 4. Focussed ion beams for micromachining and microchemistry / Diane K. Stewart and J. David Casey, Jr. -- 5. Plating techniques / Lubomyr T. Romankiw and Eugene M. O'Sullivan -- 6. High aspect ratio processing / Craig R. Fiedrich [et al.] -- 7. Sensors and actuators / Hall Jerman and Stephen Terry -- 8. Micro-optical devices / Hiroyuki Fujita and Hiroshi Toshiyoshi -- 9. Micromachined systems for neurophysiological applications / Khalil Najafi -- 10. Thin-filmed-transistor-addressed liquid crystal displays / Fang-Chen Luo -- 11. Microsensors, actuators, MEMS, and electronics for smart structures / Vijay K. Varadan and Vasundara V. Varadan -- Index
Control code
ocn985330686
Dimensions
unknown
Extent
1 online resource (viii, 692 pages)
Form of item
online
Isbn
9781510607972
Media category
electronic
Media MARC source
isbdmedia
Other control number
10.1117/3.2265071
Other physical details
illustrations
http://library.link/vocab/recordID
.b3699568x
Specific material designation
remote
System control number
  • (OCoLC)985330686
  • spie1510607978

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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