The Resource Image formation in low-voltage scanning electron microscopy, L. Reimer

Image formation in low-voltage scanning electron microscopy, L. Reimer

Label
Image formation in low-voltage scanning electron microscopy
Title
Image formation in low-voltage scanning electron microscopy
Statement of responsibility
L. Reimer
Creator
Contributor
Author
Publisher
Subject
Language
eng
Summary
While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions
Member of
Cataloging source
SPIES
Dewey number
502/.8/25
Illustrations
illustrations
Index
index present
LC call number
QH212.S3
LC item number
R44 1993eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Tutorial texts in optical engineering
Series volume
v. TT 12
Target audience
adult
Label
Image formation in low-voltage scanning electron microscopy, L. Reimer
Publication
Copyright
Note
"SPIE Digital Library."--Website
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references (pages 121-139) and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
black and white
Content category
  • still image
  • text
Content type MARC source
  • rdacontent
  • rdacontent
Contents
Preface -- Chapter 1. Introduction -- Chapter 2. Electron optics and instrumentation -- Chapter 3. Electron scattering and diffusion -- Chapter 4. Backscattered and secondary-electron diffusion -- Chapter 5. Specimen charging and damage -- Chapter 6. Signal formation and image contrast -- Chapter 7. Electron spectroscopic methods -- Summary -- Bibliography -- Index
Control code
ocn985347394
Dimensions
unknown
Extent
1 online resource (xii, 143 pages)
Form of item
online
Isbn
9781510607996
Media category
electronic
Media MARC source
isbdmedia
Other control number
10.1117/3.2265074
Other physical details
illustrations
http://library.link/vocab/recordID
.b36997304
Specific material designation
remote
System control number
  • (OCoLC)985347394
  • spie1510607994

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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