The Resource Introduction to semiconductor manufacturing technology, Hong Xiao

Introduction to semiconductor manufacturing technology, Hong Xiao

Label
Introduction to semiconductor manufacturing technology
Title
Introduction to semiconductor manufacturing technology
Statement of responsibility
Hong Xiao
Creator
Contributor
Subject
Language
eng
Summary
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations
Member of
Cataloging source
DHA
Illustrations
illustrations
Index
no index present
LC call number
TK7871.85
LC item number
.X53 2012
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
SPIE Press monograph
Series volume
PM220
Target audience
specialized
Label
Introduction to semiconductor manufacturing technology, Hong Xiao
Publication
Note
"SPIE Digital Library."--Website
Bibliography note
Includes bibliographical references
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary
Control code
ocn913039600
Dimensions
unknown
Edition
2nd ed
Extent
1 online resource (xix, 656 pages)
File format
one file format
Form of item
online
Isbn
9780819490933
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other control number
10.1117/3.924283
Other physical details
illustrations, digital file
http://library.link/vocab/recordID
.b2715449x
Specific material designation
remote
System control number
  • (OCoLC)913039600
  • spie0819490938

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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