The Resource MOEMS : micro-opto-electro-mechanical systems, Manouchehr E. Motamedi, editor

MOEMS : micro-opto-electro-mechanical systems, Manouchehr E. Motamedi, editor

Label
MOEMS : micro-opto-electro-mechanical systems
Title
MOEMS
Title remainder
micro-opto-electro-mechanical systems
Statement of responsibility
Manouchehr E. Motamedi, editor
Contributor
Editor
Publisher
Subject
Language
eng
Summary
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems
Member of
Cataloging source
SPIES
Dewey number
621.381
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.M56 2005eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
SPIE Press monograph
Series volume
PM126
Target audience
adult
Label
MOEMS : micro-opto-electro-mechanical systems, Manouchehr E. Motamedi, editor
Publication
Copyright
Note
"SPIE Digital Library."--Website
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
black and white
Content category
  • still image
  • text
Content type MARC source
  • rdacontent
  • rdacontent
Contents
Foreword / S. D. Senturia -- Preface / M. E. Motamedi -- Acknowledgments -- Chapter 1. Introduction / Manouchehr E. Motamedi -- Chapter 2. Microfabrication / Olga B. Spahn, S. Mani -- Chapter 3. Micro-optics / H. P. Herzig, E.-B. Kley, M. Cumme, L. C. Wittig -- Chapter 4. Actuation and sensing / Long Que, Yogesh B. Gianchandani -- Chapter 5. Micro-optic components, testing, and applications / Manouchehr E. Motamedi and Johannes Schwider -- Chapter 6. Fiber optic systems / Rolf Göring -- Chapter 7. Optical scanners / Tarik Bourouina, Hiroyuki Fujita, M., Gilbert Reyne, and M. Edward Motamedi -- Chapter 8. Display and imaging systems / Hakan Urey, David L. Dickensheets -- Chapter 9. Adaptive optics / Scot S. Olivier -- Chapter 10. MOEMS/MEMS CAD and simulation / Ridha Hamza, Jean Michel Karam, Philippe Nachtergaele -- Chapter 11. MEMS and MOEMS packaging / Ajay P. Malshe, John Patrick O'Connor -- Chapter 12. MOEMS and MEMS materials / William D. Cowan -- Problems and exercises -- Acronyms -- Index
Control code
ocn985343096
Dimensions
unknown
Extent
1 online resource (xxi, 614 pages)
Form of item
online
Isbn
9781510607873
Media category
electronic
Media MARC source
isbdmedia
Other control number
10.1117/3.2265061
Other physical details
illustrations
http://library.link/vocab/recordID
.b36995939
Specific material designation
remote
System control number
  • (OCoLC)985343096
  • spie1510607870

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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