The Resource Micro and nanomanufacturing, Mark J. Jackson

Micro and nanomanufacturing, Mark J. Jackson

Label
Micro and nanomanufacturing
Title
Micro and nanomanufacturing
Statement of responsibility
Mark J. Jackson
Creator
Subject
Language
eng
Cataloging source
OHX
Dewey number
620.5
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.J33 2007
Literary form
non fiction
Nature of contents
bibliography
Label
Micro and nanomanufacturing, Mark J. Jackson
Publication
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/branchCode
  • net
Contents
Machine derived contents note: 1. Principles of Micro- and Nanofabrication 1 -- 11 Introduction I -- 12 Material Removal Rates 47 -- 1.3 Conclusions 51 -- 1 A Problems 51 -- References 52 -- 2. Mi crofabrication Using X-ray Lithography 55 -- 2.1 I ntroduction 55 -- 22 X- ray Lithography 58 -- 23 Synchrotron Radiation 59 -- 2.4 .Microfabrication Process 62 -- 2.5 Methods of Resist Application 83 -- 2.6 exposure 85 -- 2.7 Probl ems 95 -- References 96 -- 3. Manufacturing High Aspect Ratio Microstructures 99 -- 3.1 Introduction 99 -- 3.2 Dry Etching 99 -- 3.3 . Plasma Etching Processes 100 -- 3A4 Characteristics of the Plasma 102 -- 3.5 Etching of Microstructures 103 -- 316 Micromachining High Aspect Ratio -- Microstructures -- 120 -- 3.7 Micromolding 120 -- 3.8 Micromolding Processes 121 -- 19 Micromolding Tools 128 -- 110 Micromold Design 131 -- 3.11 Micromolding Applications 131 -- 3.12 Limitations of Micromolding 132 -- 3.13 Fabrication of Moving Microstructures 132 -- 3114 Conclusi ons 138 -- 3.15 Problems 138 -- References 139 -- 4. Meso-micromachining 143 -- 4 1 Introduction 143 -- 4.2 Size Effects in Micromachining 144 -- 4.3 Mechanism for Large Plastic Fl ow 177 -- 44 lrihomogeneous Microstrains 178 -- 4,5 Origins of the Size Effect 180 -- 4.6 Mesa-machining Processes 182 -- 4.7 Prob1ems 188 -- References 188 -- 5. Mechanical Micromachining 191 -- 5.1 Introduction 191 -- 5.2 Microfluidic Systems 191 -- 5.3 Theory of Micromachining 195 -- 5.4 Experimental Micromachining 208 -- 5.5 Micromachining Tool Design 221 -- 5.6 High-Speed Air Turbine Spindles 226 -- 5 7 Mechanical Design of Rotors 233 -- 5.8 Discussion 250 -- 5.9 Conclusions 251 -- 5A10 Future Developments 252 -- 5.11 Problems 253 -- Referencs 253 -- 6. Microg rinding 255 -- 6.1 Introduction 255 -- 6.2 Grinding Wheels 261 -- 6.3 Conventional Grinding Processes 275 -- 6A4 Precision Grinding Processes 279 -- 6.5 Ultra Precision Grinding 299 -- 6.6 Conclusions 314 -- 67 Problems 315 -- References 315 -- 7. Diamond Micro Cutting Tooals 323 -- 7.1 introduction 323 -- 7.2 .Properties of Diamond 325 -- 7,3 History of Diamond 326 -- 7.4 CVD Diamond Technology 332 -- 7.5 CVD Diamond Processes 332 -- 7.6 Treatment of Substrate 337 -- 7.7 Modification of HFCVD Process 343 -- 7.8 Nucleation and Growth 345 -- 7.9 Deposition on 3-D Substrates 356 -- 7.10 Wear of Diamond 364 -- 7.11 Time-Modulated CVD Diamond 372 -- 7.12 Conclusions 381 -- 713 Problems 382 -- References 382 -- 8. Laser Micro- and Nanofabrication 387 -- 8.1A Introduction 387 -- 8.2 Laser Fundamental s 387 -- 8.3 Laser Microfabrication 403 -- 8A4 Laser Nanofabrication 464 -- 8.5 Conclusions 472 -- 8.6 Problems 473 -- References 473 -- 9. Micromachining Using Water Droplets 475 -- 9.1 Introduction 475 -- 9.2 Theory of Pulsed Liquid Impact 476 -- 9.3 Impact by Water Drops 480 -- 9.4 Modeling Machining Thresholds 482 -- 9.5 Comparative Results 493 -- 9.6 Material Removal Rates 497 -- 9.7 Design of Water-Based Tools 499 -- 9.8 Analysis of Space Frame 500 -- 9.9 Mode Shapes of Tetrahedral Structure 504 -- 9.10 Conclusions 516 -- 9.11 Problems 518 -- References 519 -- "10. Diamond Nanogrinding 521 -- "10.1 Introduction 521 -- "10.2 Piezoelectric Nanogrinding 522 -- 10.3 Stress Analysis in Nanogrinding Grains 524 -- 10.4 Fracture Dominated Wear Model 534 -- 10.5 Nanogrinding 535 -- 10.6 Porous Nanogrinding Tools 545 -- 107 Laser Dressing of Tools 569 -- 10.8 Future Directions 587 -- S10.9 Problems 588 -- References 589 -- 11. Nanornachining 591 -- 111 Introduction 591 -- 11 2 Nanometric machining 592 -- 11,3 Theoretical Basis of Nanomachining 595 -- 11 A Implementation 612 -- 11.5 Conclusions 631 -- 11.6 Problems 632 -- References 632 -- 12. Micro- and Nanornanufacturing 635 -- 12.1 .ntroduction 635 -- 12.2 Micromanufacturing 635 -- 12.3 Nanomanufacturing 648 -- 12.4 Commercialization Issues of Micro and -- Nanotechnologies 672 -- 12.5 Future Developments 683 -- 12.6 Problems 684 -- References 685
Control code
000041237725
Dimensions
25 cm
Extent
x, 699 p.
Isbn
9780387258744
Lccn
2006932032
Other control number
9780387258744
Other physical details
ill.
http://library.link/vocab/recordID
.b24038416
System control number
  • (OCoLC)78202883
  • springer0387258744

Library Locations

    • Deakin University Library - Geelong Waurn Ponds CampusBorrow it
      75 Pigdons Road, Waurn Ponds, Victoria, 3216, AU
      -38.195656 144.304955
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